Order 66 was a pivotal moment in Star Wars movie in chronological order: Star Wars: Episode III - Revenge of the Sith.

Star Wars TV shows.

34 Yoda

Grand Master of the Jedi Order

As seen in Star Wars: Episode III - Revenge of the Sith, Yoda was on Kashyyyk helping the native Wookiees fight off the Separatists when Order 66 was issued. Yoda sensed the disturbance in the Force, and killed the clone troopers who were about to gun him down; he then escaped Kashyyyk with the help of Chewbacca and Tarful. Yoda ed up with Obi-Wan Kenobi, returning to Coruscant to learn the truth of Anakin Skywalker's betrayal and Palpatine's Sith identity. The aged Jedi Master went into hiding, although there's some evidence the Empire thought Yoda dead before the original trilogy era.

33 Obi-Wan Kenobi

The Jedi Master exiled himself to Tatooine

Obi-Wan had been sent to Utapau to take down General Grievous, bringing the Clone Wars to an end. Clone commander Cody received the order to strike down the Jedi general; Obi-Wan, who was traver a cliff on a reptilian mount, was blasted into a river and managed to escape the turbulent waters. He successfully stole off-world, heading to Coruscant and Mustafar, where he dueled Anakin Skywalker. Triumphant, Obi-Wan delivered Anakin's infant son Luke to his aunt and uncle on Tatooine and exiled himself to the desert world.

32 Ahsoka Tano & Maul

Their survival is told in The Clone Wars season 7.

Ahsoka Tano was introduced in Star Wars: The Clone Wars as Anakin's Padawan, but she left the Jedi Order during season 5. Unfortunately, Ahsoka was drawn back into Jedi affairs in Star Wars: The Clone Wars season 7 when she returned to participate in the Siege of Mandalore. Ahsoka was on her way to deliver a captured Maul to the Jedi Council on Coruscant when Anakin fell to the dark side, and she sensed something was wrong through her bond with him.

Ahsoka and Rex faked their own deaths, although Darth Vader knew she had survived through a Force vision.

Ahsoka set Maul free as a distraction and learned about the inhibitor chip, managing to remove Rex's chip. The two fought their way through former friends until their ship crashed on an unidentified moon. Ahsoka and Rex faked their own deaths, although Darth Vader knew she had survived through a Force vision.

31 Kelleran Beq & Grogu

Grogu's savior was revealed in The Mandalorian season 3.

The Mandalorian season 3, episode 4 featured a flashback to Order 66 that revealed a Jedi Master named Kelleran Beq survived Order 66 as well. The character was played by Ahmed Best (better known as the actor for Jar Jar Binks) and was introduced as the mentor in the children's game show Star Wars: Jedi Challenge. Described as the Dean of the Jedi Order, Kelleran Beq focused on training the next generation. He escaped the Jedi Temple with the mysterious Grogu, and the two fled Coruscant. Kelleran Beq's fate is unknown, but Grogu was secreted away for decades.

30 The Grand Inquisitor

His story is still largely untold.

The Grand Inquisitor was the main antagonist of the first season of Star Wars Rebels, but after his death, it was revealed he used to be a Jedi Temple guard. He was present for Ahsoka's trial when she was accused of bombing the Jedi Temple and betraying the Order. It was ultimately revealed that Ahsoka was innocent, but the false accusation and the Order's treatment of Ahsoka left the Grand Inquisitor disillusioned with the Order, and he defected before Order 66, falling to the dark side. Later, he was approached by Palpatine about heading the Inquisitorius, the Empire’s Jedi hunters.

29 Caleb Dume

Better known as Kanan Jarrus

Caleb took up the name Kanan Jarrus and became a crucial figure in the Rebellion...

The Padawan of Depa Billaba, Caleb Dume survived Order 66 thanks to Clone Force 99. As seen in Star Wars: The Bad Batch season 1, these mutant clones could resist their inhibitor chips, and they were understandably bewildered when their brother clones started executing Jedi. They helped Caleb escape, and - as told in tie-in comics - a young Caleb was taken in by the smuggler Janus Kasmir, who advised him to abandon all connections to the Jedi. Caleb took up the name Kanan Jarrus and became a crucial figure in the Rebellion, one of the heroes of Star Wars: Rebels.

28 Luminara Unduli

Luminara's fate is still tragic

Jedi Master Luminara Unduli was revealed to have survived the initial execution in Star Wars Rebels. When the order was given, Luminara was on Kashyyyk alongside Yoda, and instead of being killed, she was captured and taken to the Spire on Stygeon Prime. She was executed by the Grand Inquisitor not long after, but the Empire kept her remains and spread rumors that she lived to lure surviving Jedi to them.

27 Reva

The Youngling who sought revenge

Introduced in the Obi-Wan Kenobi Disney+ TV show, Reva was a Padawan who survived the massacre at the Jedi Temple. She grew up on the streets of Coruscant, before finding her way to the Inquisitors; although she burned with a fierce hatred of Jedi, in truth Reva was motivated by the hope she would be able to avenge herself on Darth Vader. Her attempt failed, but she survived Vader's wrath, simply because he was more interested in Obi-Wan.

26 Fifth Brother & Seventh Sister

Two of the most dangerous Inquisitors

The Fifth Brother and Seventh Sister were of the Imperial Inquisitors and secondary antagonists in Star Wars Rebels alongside the Grand Inquisitor. The Darth Vader comics revealed all inquisitors were fallen Jedi. Any Jedi who were not executed as part of the Great Jedi Purge after Order 66 were turned to the dark side and tasked with hunting down surviving Jedi, Force-sensitive children, and political dissidents. Both the Fifth Brother and Seventh sister were unnamed former Jedi who survived Order 66 and were forced into the Inquisitorius program.

25 Trilla Suduri & The Ninth Sister

Introduced in Jedi: Fallen Order

Jedi: Fallen Order introduced other of the Inquisitorius; Trilla Suduri and the Ninth Sister. Trilla was the former Padawan of Cere Junda; surviving Order 66, the two went into hiding with a group of Younglings they were protecting. Unfortunately, both were captured and subjected to torture. Cere managed to escape, but Trilla's torture turned her into the sadistic Second Sister. Cal Kestis ended up killing the Ninth Sister at the beginning of Jedi: Survivor and Trilla was struck down by Darth Vader at the end of Jedi: Fallen Order for her failure to comply with her Inquisitor duties.